Микроскоп Keyence VR-5000

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Микроскоп Keyence VR-5000

Технические характеристики

Характеристики - Микроскоп Keyence VR-5000

Wide-Area 3D Measurement System Controller
ModelVR-5000
TypeController
HeadVR-5200, VR-5100
Field-of-viewLow magnification (wide field of view)Magnification on a 15' monitor 12?Horizontal24.0 mm
Vertical18.0 mm
Magnification on a 15' monitor 25?Horizontal12.0 mm
Vertical9.0 mm
Magnification on a 15' monitor 38?Horizontal8.0 mm
Vertical6.0 mm
Magnification on a 15' monitor 50?Horizontal
Vertical4.5 mm
High magnification (high resolution)Magnification on a 15' monitor 40?Horizontal7.6 mm
Vertical5.7 mm
Magnification on a 15' monitor 80?Horizontal3.8 mm
Vertical2.9 mm
Magnification on a 15' monitor 120?Horizontal2.5 mm
Vertical1.9 mm
Magnification on a 15' monitor 160?Horizontal
Vertical1.4 mm
Zoom1? to 4?
Height measurementDisplay resolution0.1 µm
Height measurement rangeWithout Z stitchingLow magnification (wide field of view) : 10 mm High magnification (high resolution) : 1 mm
With Z stitchingLow magnification (wide field of view) : 50 mm High magnification (high resolution) : 30 mm
Repeatability (?)Without Z stitching0.4 µm*1
With Z stitching1.0 µm*1
Measurement accuracyWithout Z stitching±2.5 µm*1
With Z stitching±4.0 µm*1
Width measurementRepeatability (?)Low magnification (wide field of view) : 1 µm High magnification (high resolution) : 0.5 µm *1
Measurement accuracyLow magnification (wide field of view) : ±5 µm High magnification (high resolution) : ±2 µm *1
Stitching functionVR-5200: Fully-automated measurement (XY automatic control + Z automatic control) , Automatic mapping creation, Automatic area setting VR-5100: Manual measurement (XY manual operation + Z automatic control) *2
XY measurable rangeVR-5200: 206 x 104 mm VR-5100: 92 x 86 mm *2
StageXY strokeVR-5200: 184 x 88 mm (motorised) VR-5100: 70 x 70 mm (manual)
Z stroke73 mm (motorised)
Load capacity4.5 kg
Working distance75 mm
Image receiving element4 megapixel monochrome CMOS
Transmitter lensDouble-telecentric lens x 2
Receiver lensDouble-telecentric lens
Light sourcesObservation light sourceLED ring light (red, blue, green)
Measurement light sourceWhite LED
Data processingDedicated PC specified by KEYENCE (OS: Windows 10 Pro)
Power supplyPower voltage100 to 240 VAC, 50/60 Hz
Power consumption200 VA max.
Environmental resistanceOperating ambient temperature+15 to 30 °C
Operating ambient humidity35 to 80 % RH (no condensation)
WeightApprox. 4 kg
*1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23 ±1 °C ) *2 Measurement expansion module (VR-H3J) required