Измерительная система Keyence IM-7030T

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Измерительная система Keyence IM-7030T

Технические характеристики

Характеристики - Измерительная система Keyence IM-7030T

Measurement Head
ModelIM-7030T
TypeHead Contact Height Measurement Unit
Image sensor1” 6.6 mega pixel monochrome CMOS
Display10. 4” LCD monitor (XGA: 1024 ? 768)
Receiver lensDouble telecentric lens
Image measurementField of viewWide-field measurement mode: 300 mm ? 200 mm (4? R50) High-precision measurement mode: 225 ? 125 mm
Minimum display unit0.1 µm
RepeatabilityW/o stage movementWide-field measurement mode: ±1 µm High-precision measurement mode: ±0.5 µm
With stage movementWide-field measurement mode: ±2 µm High-precision measurement mode: ±1.5 µm
Measurement accuracy (±2?)W/o bindingWide-field measurement mode: ±5 µm*1 High-precision measurement mode: ±2 µm*2
With bindingWide-field measurement mode: ±(7 + 0.02 L) µm*3 High-precision measurement mode: ± (4 + 0.02 L) µm*4
Light probe MeasurementMeasurable area (XY)190 ? 90 mm
Maximum measurement depth30 mm
Light probe diametero3 mm
Measuring force0.015 N
Repeatability±2 µm*5
Measurement accuracy±(8 + 0.02 L) µm*6
Height MeasurementMeasurement range0 to 75 mm
Measuring force0.3 N
Measurement accuracy (XY)±0.2 mm*7
Minimum display unit1 µm
Measurable area (XY)Wide-field measurement mode: 145 ? 95 mm High-precision measurement mode: 107.5 ? 95 mm
Repeatability±2 µm*8
Measurement accuracy±7.5 µm*9
External remote inputNon-voltage input (with and without contact)
External outputOK/NG/FAIL/MEAS.PhotoMos output Rated load 24 VDC 0.5 A ON resistance 50 m? or lower
InterfaceLANRJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
USB 2.0 series A6 ports (front: 2, rear: 4)
RecordHard disk drive500 GB
Illumination systemTransparentTelecentric transparent illumination
RingFour division, multi-angle illumination (electric) Slit ring (directivity) illumination (electric)
XY stageMoving range200 ? 100 mm (electric)
Withstand load7.5 kg
Z stageMoving range75 mm (electric)
Power supplyPower voltage100–240 VAC, 50/60 Hz
Current consumption430 VA or lower
Environmental resistanceOperating ambient temperature+10°C to 35°C
Operating ambient humidity20% RH to 80% RH (no condensation)
WeightApprox. 35 kg
*1 In the range of o80 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position *2 In the range of o20 mm within the operating ambient temperature range of +23°C ±1°C at the focused focal point position *3 In the range of 280 ? 180 mm (4? R40), within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units) *4 In the range of 220 ? 120 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 3 kg or less on the stage (L = amount of stage movement in mm units) *5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm *6 When the detection system is standard, and the ambient temperature is +23°C ±1°C, with a stage load weighing 3 kg or less. If the detection system is at a deep position,then ±(10 + 0.02 L) µm with L as the measurement length in mm. *7 Operating ambient temperature: 23°C ±1°C. *8 With a maximum measurement height of 30 mm or less. ±3 µm when maximum measurement height is between 30 mm and 75 mm. *9 With a maximum measurement height of 30 mm or less. ±9.5 µm when maximum measurement height is between 30 mm and 75 mm.